Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728185 | Steam-assisted single substrate cleaning process and apparatus | Jianshe Tang, Wei Lu, Haosheng Wu, Shou-Sung Chang, Hari Soundararajan +1 more | 2023-08-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728185 | Steam-assisted single substrate cleaning process and apparatus | Jianshe Tang, Wei Lu, Haosheng Wu, Shou-Sung Chang, Hari Soundararajan +1 more | 2023-08-15 |