Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11697187 | Temperature-based assymetry correction during CMP and nozzle for media dispensing | Haosheng Wu, Shou-Sung Chang, Jianshe Tang, Chih Chung, Hari Soundararajan +1 more | 2023-07-11 |
| 11633833 | Use of steam for pre-heating of CMP components | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Paul D. Butterfield +2 more | 2023-04-25 |
| 11628478 | Steam cleaning of CMP components | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Chih Chung Chou +2 more | 2023-04-18 |
| 11577358 | Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing | Surajit Kumar, Chih Chung Chou, Shou-Sung Chang | 2023-02-14 |