Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11818810 | Heater assembly with purge gap control and temperature uniformity for batch processing chambers | Dhritiman Subha Kashyap, Kartik Shah, Ashutosh Agarwal, Eric J. Hoffmann, Sanjeev Baluja +1 more | 2023-11-14 |