Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823870 | PEALD titanium nitride with direct microwave plasma | Arkaprava Dan, Joseph AuBuchon, Kyoung Ha Kim, Philip Allan Kraus | 2023-11-21 |
| 11761083 | Methods for controlling a flow pulse shape | Joseph AuBuchon, Kevin Griffin | 2023-09-19 |
| 11626281 | PEALD nitride films | Philip Allan Kraus, Joseph AuBuchon | 2023-04-11 |
| 11586789 | Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity | Dhritiman Subha Kashyap, Chaowei Wang, Kartik Shah, Kevin Griffin, Karthik Ramanathan +2 more | 2023-02-21 |