Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823870 | PEALD titanium nitride with direct microwave plasma | Hanhong Chen, Arkaprava Dan, Joseph AuBuchon, Philip Allan Kraus | 2023-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823870 | PEALD titanium nitride with direct microwave plasma | Hanhong Chen, Arkaprava Dan, Joseph AuBuchon, Philip Allan Kraus | 2023-11-21 |