Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810810 | Contour pocket and hybrid susceptor for wafer uniformity | Kaushal Gangakhedkar, Kallol Bera | 2023-11-07 |
| 11798825 | In-situ wafer rotation for carousel processing chambers | Alexander S. Polyak | 2023-10-24 |
| 11557501 | Contour pocket and hybrid susceptor for wafer uniformity | Kaushal Gangakhedkar, Kallol Bera | 2023-01-17 |