Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798825 | In-situ wafer rotation for carousel processing chambers | Joseph Yudovsky | 2023-10-24 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798825 | In-situ wafer rotation for carousel processing chambers | Joseph Yudovsky | 2023-10-24 |