Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837464 | Methods, systems, and apparatus for tape-frame substrate cleaning and drying | Ying Wang, Guan Huei See | 2023-12-05 |
| 11814744 | Substrate cleaning components and methods in a plating system | Nolan L. Zimmerman, Andrew Anten, Richard W. Plavidal, Eric J. Bergman, Tricia Youngbull +2 more | 2023-11-14 |
| 11705312 | Vertically adjustable plasma source | Tsutomu Tanaka, Jared Ahmad Lee, Rakesh Ramadas, Dmitry A. Dzilno, Sriharish Srinivasan | 2023-07-18 |
| 11697887 | Multi-compartment electrochemical replenishment cell | Nolan L. Zimmerman, Charles Sharbono, Paul R. McHugh, Paul Van Valkenburg, Deepak Saagar Kalaikadal +1 more | 2023-07-11 |
| 11585009 | Mechanically-driven oscillating flow agitation | Paul R. McHugh | 2023-02-21 |
| 11578422 | Electroplating system | Paul R. McHugh, Kyle M. Hanson, John L. Klocke, Paul Van Valkenburg, Eric J. Bergman +5 more | 2023-02-14 |
| 11550224 | Apparatus for post exposure bake | Kyle M. Hanson, Viachslav Babayan | 2023-01-10 |