Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11788200 | Fluid recovery in semiconductor processing | Sam Lee, Eric J. Bergman | 2023-10-17 |
| 11697887 | Multi-compartment electrochemical replenishment cell | Nolan L. Zimmerman, Charles Sharbono, Gregory J. Wilson, Paul R. McHugh, Paul Van Valkenburg +1 more | 2023-07-11 |
| 11686005 | Electroplating systems and methods with increased metal ion concentrations | Kwan Wook Roh, Charles Sharbono | 2023-06-27 |
| 11578422 | Electroplating system | Paul R. McHugh, Gregory J. Wilson, John L. Klocke, Paul Van Valkenburg, Eric J. Bergman +5 more | 2023-02-14 |
| 11550224 | Apparatus for post exposure bake | Gregory J. Wilson, Viachslav Babayan | 2023-01-10 |
| 11551942 | Methods and apparatus for cleaning a substrate after processing | Manoj A. Gajendra, Mahadev Joshi, Arvind Thiyagarajan, Jon C. Farr | 2023-01-10 |