Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11814744 | Substrate cleaning components and methods in a plating system | Nolan L. Zimmerman, Gregory J. Wilson, Andrew Anten, Richard W. Plavidal, Eric J. Bergman +2 more | 2023-11-14 |
| 11788200 | Fluid recovery in semiconductor processing | Kyle M. Hanson, Eric J. Bergman | 2023-10-17 |