Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823939 | Apparatus and methods for processing chamber lid concentricity alignment | Kwok Feng Wong, Ashutosh Agarwal | 2023-11-21 |
| 11705312 | Vertically adjustable plasma source | Tsutomu Tanaka, Jared Ahmad Lee, Dmitry A. Dzilno, Gregory J. Wilson, Sriharish Srinivasan | 2023-07-18 |