Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705312 | Vertically adjustable plasma source | Tsutomu Tanaka, Jared Ahmad Lee, Rakesh Ramadas, Dmitry A. Dzilno, Gregory J. Wilson | 2023-07-18 |
| 11581213 | Susceptor wafer chucks for bowed wafers | Abhishek Chowdhury, Vijayabhaskara Venkatagiriyappa, Mihaela Balseanu, Jyoti Prakash Deo, Srinivas Ramakrishna +4 more | 2023-02-14 |