Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11800824 | Low temperature silicon nitride/silicon oxynitride stack film with tunable dielectric constant | Maribel Maldonado-Garcia, Cong Trinh | 2023-10-24 |
| 11732356 | Multilayer encapsulation stacks by atomic layer deposition | Cong Trinh, Maribel Maldonado-Garcia, Ning Li, Mark Saly, Bhaskar Jyoti Bhuyan +2 more | 2023-08-22 |
| 11713507 | Low-k films | Shuaidi Zhang, Ning Li | 2023-08-01 |
| 11692267 | Plasma induced modification of silicon carbide surface | Francis Kanyiri Mungai, Vijayabhaskara Venkatagiriyappa, Yung-Cheng Hsu, Keiichi Tanaka, Mario David Silvetti | 2023-07-04 |
| 11581213 | Susceptor wafer chucks for bowed wafers | Abhishek Chowdhury, Vijayabhaskara Venkatagiriyappa, Jyoti Prakash Deo, Srinivas Ramakrishna, Keiichi Tanaka +4 more | 2023-02-14 |