Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11768299 | Radiation analyzer | Akira Takano | 2023-09-26 |
| 11692267 | Plasma induced modification of silicon carbide surface | Francis Kanyiri Mungai, Vijayabhaskara Venkatagiriyappa, Yung-Cheng Hsu, Mario David Silvetti, Mihaela Balseanu | 2023-07-04 |
| 11693319 | Substrate processing method, substrate processing apparatus, and storage medium | Kosuke Yoshihara, Yoshihiro Kondo, Makoto Muramatsu, Teruhiko Kodama | 2023-07-04 |
| 11581213 | Susceptor wafer chucks for bowed wafers | Abhishek Chowdhury, Vijayabhaskara Venkatagiriyappa, Mihaela Balseanu, Jyoti Prakash Deo, Srinivas Ramakrishna +4 more | 2023-02-14 |