Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823897 | Method for forming insulating film, apparatus for processing substrate, and system for processing substrate | Hisashi Genjima | 2023-11-21 |
| 11693319 | Substrate processing method, substrate processing apparatus, and storage medium | Keiichi Tanaka, Kosuke Yoshihara, Yoshihiro Kondo, Teruhiko Kodama | 2023-07-04 |
| 11631581 | Insulating film forming method, insulating film forming device, and substrate processing system | Yusuke Saito, Hisashi Genjima, Hiroyuki Fujii | 2023-04-18 |
| 11574812 | Computer storage medium to perform a substrate treatment method using a block copolymer containing a hydrophilic and hydrophobic copolymers | Tadatoshi Tomita, Hisashi Genjima, Gen You, Takahiro Kitano | 2023-02-07 |