Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11693319 | Substrate processing method, substrate processing apparatus, and storage medium | Keiichi Tanaka, Kosuke Yoshihara, Yoshihiro Kondo, Makoto Muramatsu | 2023-07-04 |
| 11554389 | Substrate cleaning apparatus and substrate cleaning method | Akihiro Kubo, Yasushi Takiguchi, Yoshiki Okamoto | 2023-01-17 |