Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852578 | Microparticle measurement spectrometer, microparticle measurement device using the microparticle measurement spectrometer, and method for calibrating microparticle measurement photoelectric conversion system | Masaaki Hara, Tomoyuki Umetsu | 2023-12-26 |
| 11554389 | Substrate cleaning apparatus and substrate cleaning method | Akihiro Kubo, Yasushi Takiguchi, Teruhiko Kodama | 2023-01-17 |