Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11554389 | Substrate cleaning apparatus and substrate cleaning method | Yasushi Takiguchi, Teruhiko Kodama, Yoshiki Okamoto | 2023-01-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11554389 | Substrate cleaning apparatus and substrate cleaning method | Yasushi Takiguchi, Teruhiko Kodama, Yoshiki Okamoto | 2023-01-17 |