Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764070 | Etching method and etching apparatus | Satoshi TODA, Naoki Shindo, Haruna Suzuki | 2023-09-19 |
| 11574812 | Computer storage medium to perform a substrate treatment method using a block copolymer containing a hydrophilic and hydrophobic copolymers | Makoto Muramatsu, Tadatoshi Tomita, Hisashi Genjima, Takahiro Kitano | 2023-02-07 |