Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823897 | Method for forming insulating film, apparatus for processing substrate, and system for processing substrate | Makoto Muramatsu | 2023-11-21 |
| 11631581 | Insulating film forming method, insulating film forming device, and substrate processing system | Makoto Muramatsu, Yusuke Saito, Hiroyuki Fujii | 2023-04-18 |
| 11574812 | Computer storage medium to perform a substrate treatment method using a block copolymer containing a hydrophilic and hydrophobic copolymers | Makoto Muramatsu, Tadatoshi Tomita, Gen You, Takahiro Kitano | 2023-02-07 |