Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11692267 | Plasma induced modification of silicon carbide surface | Francis Kanyiri Mungai, Vijayabhaskara Venkatagiriyappa, Yung-Cheng Hsu, Keiichi Tanaka, Mihaela Balseanu | 2023-07-04 |
| 11584992 | Gas distribution assembly for improved pump-purge and precursor delivery | Kenneth Brian Doering, Kevin Griffin | 2023-02-21 |
| 11581213 | Susceptor wafer chucks for bowed wafers | Abhishek Chowdhury, Vijayabhaskara Venkatagiriyappa, Mihaela Balseanu, Jyoti Prakash Deo, Srinivas Ramakrishna +4 more | 2023-02-14 |