Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11826873 | Apparatus and methods for susceptor deposition material removal | Nitin Bhargav, Tae Kwang Lee | 2023-11-28 |
| 11692267 | Plasma induced modification of silicon carbide surface | Francis Kanyiri Mungai, Yung-Cheng Hsu, Keiichi Tanaka, Mario David Silvetti, Mihaela Balseanu | 2023-07-04 |
| 11581213 | Susceptor wafer chucks for bowed wafers | Abhishek Chowdhury, Mihaela Balseanu, Jyoti Prakash Deo, Srinivas Ramakrishna, Keiichi Tanaka +4 more | 2023-02-14 |