Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699571 | Semiconductor processing chambers for deposition and etch | Khokan Chandra Paul, Vijet Patil, Carlaton WONG, Adam J. Fischbach, Timothy Franklin +2 more | 2023-07-11 |
| 11664247 | Dynamic interface for providing a symmetric radio frequency return path | — | 2023-05-30 |