Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850745 | Multi-turn drive assembly and systems and methods of use thereof | Damon K. Cox, Rajkumar Thanu | 2023-12-26 |
| 11749540 | Dual actuating tilting slit valve | Nir Merry | 2023-09-05 |
| 11547030 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, David Fenwick +6 more | 2023-01-03 |