Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742235 | Coaxial lift device with dynamic leveling | Jeffrey Blahnik, Amit Kumar BANSAL | 2023-08-29 |
| 11590662 | Robot for simultaneous substrate transfer | Paul Z. Wirth, Charles T. Carlson | 2023-02-28 |
| 11574826 | High-density substrate processing systems and methods | Steve Hongkham, Charles T. Carlson, Tuan Nguyen, Swaminathan Srinivasan, Khokan Chandra Paul | 2023-02-07 |