Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764041 | Adjustable thermal break in a substrate support | Daniel Sang Byun, Andreas Schmid, Stephen Prouty, Andrew Antoine NOUJAIM | 2023-09-19 |
| 11666952 | Condition selectable backside gas | Stephen Prouty, Martin Perez-Guzman, Sumanth Banda, Rajinder Dhindsa | 2023-06-06 |
| 11646183 | Substrate support assembly with arc resistant coolant conduit | Stephen Prouty, Andreas Schmid, Andrew Antoine NOUJAIM | 2023-05-09 |