Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810768 | Temperature and bias control of edge ring | James Rogers, Rajinder Dhindsa | 2023-11-07 |
| 11798790 | Apparatus and methods for controlling ion energy distribution | James Rogers | 2023-10-24 |
| 11791138 | Automatic electrostatic chuck bias compensation during plasma processing | James Rogers, Leonid Dorf | 2023-10-17 |
| 11776789 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy +4 more | 2023-10-03 |