Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798788 | Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathode | Sunggil Kang, Sungyong Lim, Beomjin Yoo, Akira Koshiishi, Vasily Pashkovskiy +1 more | 2023-10-24 |
| 11664242 | Cleaning solution production systems and methods, and plasma reaction tanks | Beom Jin Yoo, Min Hyoung Kim, Won Hyuk Jang, Kyu-Hee Han, Young Do Kim +1 more | 2023-05-30 |
| 11594400 | Multi zone gas injection upper electrode system | Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Jim Rogers +6 more | 2023-02-28 |
| 11545372 | Plasma generator, cleaning liquid processing apparatus, semiconductor device cleaning apparatus, cleaning liquid processing method, and method of manufacturing semiconductor device | Beom Jin Yoo, Min Hyoung Kim, Lu Siqing, Won Hyuk Jang, Kyu-Hee Han | 2023-01-03 |