Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11545372 | Plasma generator, cleaning liquid processing apparatus, semiconductor device cleaning apparatus, cleaning liquid processing method, and method of manufacturing semiconductor device | Beom Jin Yoo, Min Hyoung Kim, Sang Ki Nam, Won Hyuk Jang, Kyu-Hee Han | 2023-01-03 |