Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664242 | Cleaning solution production systems and methods, and plasma reaction tanks | Beom Jin Yoo, Sang Ki Nam, Won Hyuk Jang, Kyu-Hee Han, Young Do Kim +1 more | 2023-05-30 |
| 11545372 | Plasma generator, cleaning liquid processing apparatus, semiconductor device cleaning apparatus, cleaning liquid processing method, and method of manufacturing semiconductor device | Beom Jin Yoo, Sang Ki Nam, Lu Siqing, Won Hyuk Jang, Kyu-Hee Han | 2023-01-03 |