Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594400 | Multi zone gas injection upper electrode system | Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam, Jim Rogers +6 more | 2023-02-28 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594400 | Multi zone gas injection upper electrode system | Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam, Jim Rogers +6 more | 2023-02-28 |