Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670486 | Pulsed plasma chamber in dual chamber configuration | Rajinder Dhindsa, Eric A. Hudson, Andrew D. Bailey, III | 2023-06-06 |
| 11651991 | Electrostatic Chuck design for cooling-gas light-up prevention | Alexander Matyushkin, John Holland, Keith Gaff, Felix Kozakevich | 2023-05-16 |
| 11594400 | Multi zone gas injection upper electrode system | Ryan Bise, Rajinder Dhindsa, Lumin Li, Sang Ki Nam, Jim Rogers +6 more | 2023-02-28 |