Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664262 | Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns | Alexander Matyushkin, Keith Comendant | 2023-05-30 |
| 11651991 | Electrostatic Chuck design for cooling-gas light-up prevention | Alexander Matyushkin, Alexei Marakhtanov, Keith Gaff, Felix Kozakevich | 2023-05-16 |