Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848177 | Multi-plate electrostatic chucks with ceramic baseplates | Feng Wang, Christopher Kimball | 2023-12-19 |
| 11781650 | Edge seal for lower electrode assembly | David Schaefer, Ambarish Chhatre, Sung Je Kim, Brooke Mesler Lai | 2023-10-10 |
| 11651991 | Electrostatic Chuck design for cooling-gas light-up prevention | Alexander Matyushkin, Alexei Marakhtanov, John Holland, Felix Kozakevich | 2023-05-16 |