Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848177 | Multi-plate electrostatic chucks with ceramic baseplates | Keith Gaff, Christopher Kimball | 2023-12-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848177 | Multi-plate electrostatic chucks with ceramic baseplates | Keith Gaff, Christopher Kimball | 2023-12-19 |