Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784032 | Tilted magnetron in a PVD sputtering deposition chamber | Xiaodong Yang, Yufei Zhou, Yi Yang | 2023-10-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784032 | Tilted magnetron in a PVD sputtering deposition chamber | Xiaodong Yang, Yufei Zhou, Yi Yang | 2023-10-10 |