Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11713508 | Apparatus and methods for improving chemical utilization rate in deposition process | Kevin Griffin, Sanjeev Baluja, Joseph AuBuchon, Mario D. Silvetti | 2023-08-01 |
| 11631583 | RF power source operation in plasma enhanced processes | Farhad Moghadam, Dmitry A. Dzilno | 2023-04-18 |