Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11631583 | RF power source operation in plasma enhanced processes | Hari Ponnekanti, Dmitry A. Dzilno | 2023-04-18 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11631583 | RF power source operation in plasma enhanced processes | Hari Ponnekanti, Dmitry A. Dzilno | 2023-04-18 |