Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821083 | Gas separation control in spatial atomic layer deposition | Ning Li, Steven Marcus, Kevin Griffin | 2023-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821083 | Gas separation control in spatial atomic layer deposition | Ning Li, Steven Marcus, Kevin Griffin | 2023-11-21 |