Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776822 | Wet cleaning of electrostatic chuck | Tuochuan Huang, Gang Peng, David W. Groechel, Vijay D. Parkhe, David Benjaminson | 2023-10-03 |
SK
Shinnosuke Kawaguchi
Overall (2023): #257,061 of 537,848Top 50%
1
Patents 2023