Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776822 | Wet cleaning of electrostatic chuck | Tuochuan Huang, David W. Groechel, Vijay D. Parkhe, Shinnosuke Kawaguchi, David Benjaminson | 2023-10-03 |
| 11718827 | LRFFT2 cell | Shunchang JIAO, Rong Zhang, Tianfu Zhang, Zishan Zhou, Jiasen Xie +1 more | 2023-08-08 |
| 11710647 | Hyperbaric clean method and apparatus for cleaning semiconductor chamber components | Richard W. Plavidal, Scott Osterman, David W. Groechel, John Z. Smith | 2023-07-25 |
| 11661652 | Wet cleaning inside of gasline of semiconductor process equipment | Halbert Chong, Marcus Pereira, David W. Groechel | 2023-05-30 |
| 11578855 | Night lamp and method for controlling the same | Binwen Liu, Lishun Peng, Dongping Zheng, Jianhua Chen, Peilong Pang | 2023-02-14 |