Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710647 | Hyperbaric clean method and apparatus for cleaning semiconductor chamber components | Richard W. Plavidal, Scott Osterman, David W. Groechel, Gang Peng | 2023-07-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710647 | Hyperbaric clean method and apparatus for cleaning semiconductor chamber components | Richard W. Plavidal, Scott Osterman, David W. Groechel, Gang Peng | 2023-07-25 |