Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11661652 | Wet cleaning inside of gasline of semiconductor process equipment | Gang Peng, Halbert Chong, David W. Groechel | 2023-05-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11661652 | Wet cleaning inside of gasline of semiconductor process equipment | Gang Peng, Halbert Chong, David W. Groechel | 2023-05-30 |