Issued Patents 2022
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531278 | EUV lithography system and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2022-12-20 |
| 11528798 | Replacement method for droplet generator | Shih-Yu Tu, Han-Lung Chang, Hsiao-Lun Chang, Li-Jui Chen | 2022-12-13 |
| 11513441 | EUV radiation source apparatus for lithography | Yu-Chih Chen, Li-Jui Chen, Shang-Chieh Chien, Sheng-Kang Yu, Wei-Chun Yen | 2022-11-29 |
| 11483918 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu +1 more | 2022-10-25 |
| 11467498 | Extreme ultraviolet control system | Jen-Yang Chung, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen | 2022-10-11 |
| 11470710 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Han-Lung Chang, Li-Jui Chen, Hsiao-Lun Chang | 2022-10-11 |
| 11452197 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Yee-Shian Henry TONG +3 more | 2022-09-20 |
| 11419203 | EUV radiation modification methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen | 2022-08-16 |
| 11333983 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2022-05-17 |
| 11320733 | Reticle with conductive material structure | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen +1 more | 2022-05-03 |
| 11294293 | Overlay marks for reducing effect of bottom layer asymmetry | Hung-Chih Hsieh, Kai-Hsiung Chen | 2022-04-05 |
| 11275318 | Radiation source for lithography process | Shang-Ying WU, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen | 2022-03-15 |
| 11272606 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Chia-Chen Chen, Jen-Yang Chung, Li-Jui Chen, Tzung-Chi Fu +1 more | 2022-03-08 |
| 11269257 | Apparatus and method for generating extreme ultraviolet radiation | Chieh Hsieh, Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Bo-Tsun Liu +1 more | 2022-03-08 |
| 11237482 | Process system and operating method thereof | Chao-Chen Chang, Shao-Wei Luo, Jen-Yang Chung, Shang-Chieh Chien, Li-Jui Chen | 2022-02-01 |
| 11221562 | Reticle and method of detecting intactness of reticle stage using the same | Chia-Yu Lee, Tao Chen, Ching-Juinn Huang | 2022-01-11 |
| 11224115 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Tzung-Chi Fu +1 more | 2022-01-11 |
| 11219115 | EUV collector contamination prevention | Ming-Fa Wu, Tzung-Chi Fu, Chun Che Lin, Huai-Tei Yang | 2022-01-04 |