Issued Patents 2022
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531278 | EUV lithography system and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Bo-Tsun Liu +2 more | 2022-12-20 |
| 11483918 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2022-10-25 |
| 11419203 | EUV radiation modification methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2022-08-16 |
| 11333983 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Bo-Tsun Liu +2 more | 2022-05-17 |
| 11320733 | Reticle with conductive material structure | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Li-Jui Chen, Po-Chung Cheng +1 more | 2022-05-03 |
| 11272606 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Jen-Yang Chung, Li-Jui Chen +1 more | 2022-03-08 |
| 11224115 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng +1 more | 2022-01-11 |
| 11219115 | EUV collector contamination prevention | Ming-Fa Wu, Chun Che Lin, Po-Chung Cheng, Huai-Tei Yang | 2022-01-04 |