Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467498 | Extreme ultraviolet control system | Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2022-10-11 |
| 11272606 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Li-Jui Chen, Tzung-Chi Fu +1 more | 2022-03-08 |
| 11237482 | Process system and operating method thereof | Chao-Chen Chang, Shao-Wei Luo, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2022-02-01 |