Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360392 | Photolithography device having illuminator and method for adjusting intensity uniformity | Che-Chang Hsu, Chieh-Jen Cheng, Li-Jui Chen, Shang-Chieh Chien, Ssu-Yu Chen | 2022-06-14 |
| 11237482 | Process system and operating method thereof | Shao-Wei Luo, Jen-Yang Chung, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2022-02-01 |