Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531278 | EUV lithography system and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2022-12-20 |
| 11360392 | Photolithography device having illuminator and method for adjusting intensity uniformity | Che-Chang Hsu, Chieh-Jen Cheng, Li-Jui Chen, Shang-Chieh Chien, Chao-Chen Chang | 2022-06-14 |
| 11333983 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2022-05-17 |
| 11320744 | Method and apparatus for controlling extreme ultraviolet light | Shang-Chieh Chien, Li-Jui Chen | 2022-05-03 |
| 11297710 | Extreme ultraviolet lithography system with heated tin vane bucket having a heated cover | Shang-Chieh Chien, Li-Jui Chen | 2022-04-05 |