Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531278 | EUV lithography system and method for decreasing debris in EUV lithography system | Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2022-12-20 |
| 11506986 | Thermal controlling method in lithography system | Yen-Shuo Su, Jui-Pin Wu, Li-Jui Chen | 2022-11-22 |
| 11482422 | Method for manufacturing semiconductor structure | Nai-Han Cheng | 2022-10-25 |
| 11450586 | Heat dissipation structure, semiconductor packaging device, and manufacturing method of the semiconductor packaging device | Jia-Liang Chen, YEN-CHAO LIN | 2022-09-20 |
| 11402761 | Semiconductor lithography system and/or method | Tsiao-Chen Wu, Hsu-Shui Liu | 2022-08-02 |
| 11264321 | Semiconductor devices employing a barrier layer | Ying-Hsueh Chang Chien, Yu-Ming Lee, Man-Kit Leung | 2022-03-01 |
| 11255658 | Ellipsometer and method for estimating thickness of film | Feng Yuan Hsu, Ching-Hsiang Hsu, Chyi Shyuan Chern | 2022-02-22 |