Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11517995 | Wet chemical heating system and a method of chemical mechanical polishing | Ji Cui, CHIA-HSUN CHANG, Chih-Hung Chen, Liang-Guang Chen, Tzu kai Lin +1 more | 2022-12-06 |
| 11255658 | Ellipsometer and method for estimating thickness of film | Feng Yuan Hsu, Chi-Ming Yang, Ching-Hsiang Hsu | 2022-02-22 |